Oxford 80+PE-CVD tool w/b cracker furnac

Facility/equipment: Equipment

  • Technology and Innovation Centre

Description

Deposits silcon oxide from dilute silane and nitrous oxide, typically at ca 300 deg C. Also has an ammonia-free silicon nitride capability.

Details

NameOxford 80+PE-CVD tool w/b cracker furnac
Acquisition date27/06/13

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crackers
nitrous oxide
oxides
ammonia
silicon nitride