Oxford 80+ RIE Etch Tool #2 w/turbo pump

Facility/equipment: Equipment

  • Technology and Innovation Centre

Equipments Details


Used for sputter etching on non-reactive metals. Process gases include sulfur hexafluoride, oxygen and argon.


NameOxford 80+ RIE Etch Tool #2 w/turbo pump
Acquisition date25/06/13


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