Oxford 80+ RIE Etch Tool #2 w/turbo pump

Facility/equipment: Equipment

  • Technology and Innovation Centre

Description

Used for sputter etching on non-reactive metals. Process gases include sulfur hexafluoride, oxygen and argon.

Details

NameOxford 80+ RIE Etch Tool #2 w/turbo pump
Acquisition date25/06/13

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Sulfur hexafluoride
Reactive ion etching
Argon
Etching
Pumps
Oxygen
Metals
Gases