Matrix 105 Plasma Asher cw wafer loader

Ian Watson

Institute Of Photonics

Facility/equipment: Equipment

LocationShow on map
Technology and Innovation Centre

Description

Has heated sample platen, and effective for damage-free removal of photorest residues in an oxygen-based plasma.

Details

Name	Matrix 105 Plasma Asher cw wafer loader
Acquisition date	1/08/09

Contact information

Emails	[email protected]
Links	Website

Terms of loan/booking

Available for loan - internal and external

Data for: "Suspension and transfer printing of ZnCdMgSe membranes from an InP substrate"
Chappell, G. (Creator), Guilhabert, B. J. E. (Contributor), Garcia, T. (Contributor), Zhao, K. (Contributor), Watson, I. (Contributor), Dawson, M. (Contributor), Tamargo, M. (Contributor) & Hastie, J. (Supervisor), University of Strathclyde, 11 Nov 2020
DOI: 10.15129/b3974689-3d7c-49d0-ab7a-c7fd7c1f1382
Dataset