Equipments Details
Description
Has heated sample platen, and effective for damage-free removal of photorest residues in an oxygen-based plasma.
Details
| Name | Matrix 105 Plasma Asher cw wafer loader |
|---|---|
| Acquisition date | 1/08/09 |
Fingerprint
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Datasets
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Data for: "Suspension and transfer printing of ZnCdMgSe membranes from an InP substrate"
Chappell, G. (Creator), Guilhabert, B. J. E. (Contributor), Garcia, T. (Contributor), Zhao, K. (Contributor), Watson, I. (Contributor), Dawson, M. (Contributor), Tamargo, M. (Contributor) & Hastie, J. (Supervisor), University of Strathclyde, 11 Nov 2020
DOI: 10.15129/b3974689-3d7c-49d0-ab7a-c7fd7c1f1382
Dataset