Matrix 105 Plasma Asher cw wafer loader

Facility/equipment: Equipment

  • Technology and Innovation Centre

Description

Has heated sample platen, and effective for damage-free removal of photorest residues in an oxygen-based plasma.

Details

NameMatrix 105 Plasma Asher cw wafer loader
Acquisition date1/08/09

Fingerprint

platens
wafers
damage
oxygen
matrices