Equipments Details
Details
| Name | Laser Lithography System |
|---|---|
| Acquisition date | 5/12/19 |
Datasets
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Data for: "Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips"
Freier, N. K. (Creator), Ghosh, S. (Creator), Guilhabert, B. J. E. (Creator), Kappers, M. J. (Creator), Hinz, A. (Creator), Toon, M. (Creator), Oliver, R. A. (Creator), Dawson, M. (Creator) & Strain, M. (Supervisor), University of Strathclyde, 7 Nov 2022
DOI: 10.15129/1352ed1d-5b90-4b7f-9541-a9dcffe1d275
Dataset