Karl Suss MA6 Mask Aligner

Institute Of Photonics

Facility/equipment: Equipment

Technology and Innovation Centre

Description

Routinely used in contact mode, with resolution down to 2-3 microns.

Details

Name	Karl Suss MA6 Mask Aligner
Acquisition date	27/06/13

Contact information

Emails	[email protected]
Links	Website

Data for: "Suspension and transfer printing of ZnCdMgSe membranes from an InP substrate"
Chappell, G. (Creator), Guilhabert, B. J. E. (Contributor), Garcia, T. (Contributor), Zhao, K. (Contributor), Watson, I. (Contributor), Dawson, M. (Contributor), Tamargo, M. (Contributor) & Hastie, J. (Supervisor), University of Strathclyde, 11 Nov 2020
DOI: 10.15129/b3974689-3d7c-49d0-ab7a-c7fd7c1f1382
Dataset