Karl Suss MA6 Mask Aligner

Facility/equipment: Equipment

  • Technology and Innovation Centre

Equipments Details

Description

Routinely used in contact mode, with resolution down to 2-3 microns.

Details

NameKarl Suss MA6 Mask Aligner
Acquisition date27/06/13

Fingerprint Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.