Equipments Details
Description
Routinely used in contact mode, with resolution down to 2-3 microns.
Details
Name | Karl Suss MA6 Mask Aligner |
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Acquisition date | 27/06/13 |
Datasets
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Data for: "Suspension and transfer printing of ZnCdMgSe membranes from an InP substrate"
Chappell, G. (Creator), Guilhabert, B. J. E. (Contributor), Garcia, T. (Contributor), Zhao, K. (Contributor), Watson, I. (Contributor), Dawson, M. (Contributor), Tamargo, M. (Contributor) & Hastie, J. (Supervisor), University of Strathclyde, 11 Nov 2020
DOI: 10.15129/b3974689-3d7c-49d0-ab7a-c7fd7c1f1382
Dataset