Alicona Measurement

    Margo Hutchison (Manager)

Facility/equipment: Equipment

  • Advanced Forming Research Centre

Description

Purpose

Optical surface characterisation

Specifications

— Non-contact optical 3 dim. surface digitisation based on Focus-Variation — Surface profile form and roughness measurement — Surface topography Ra above 10-15 nm with a Lc of 2um, surface structure dependent — Minimum vertical repeatability less than 0.12 — Best vertical resolution in the range of 10 to 410 nm — Fully automated and programmable xyz stages — 5x, 20x, 50x and 100x objective

Details

NameAlicona Measurement
Acquisition date1/12/11
ManufacturersAlicona

Fingerprint

digitization
roughness
topography