Data resulting from the investigation of wide bandgap AlGaN:Si by wavelength dispersive X-Ray measurements



This dataset is the result of a systematic investigation of the Si concentration and composition of AlGaN:Si by wavelength dispersive X-ray measurements (WDX). The investigated samples cover a composition range of 80-100% AlN with a Si concentration between 3*10^18 to 14*10^18. The data was acquired using a Cameca SX 100 electron probe microanalyser. The dataset contains two Files, one for the weight% and one for the atomic%.
Date made available11 Jan 2017
PublisherUniversity of Strathclyde
Date of data production3 Mar 2016

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