Data resulting from the investigation of wide bandgap AlGaN:Si by wavelength dispersive X-Ray measurements

Dataset

Description

This dataset is the result of a systematic investigation of the Si concentration and composition of AlGaN:Si by wavelength dispersive X-ray measurements (WDX). The investigated samples cover a composition range of 80-100% AlN with a Si concentration between 3*10^18 to 14*10^18. The data was acquired using a Cameca SX 100 electron probe microanalyser. The dataset contains two Files, one for the weight% and one for the atomic%.
Date made available11 Jan 2017
PublisherUniversity of Strathclyde
Date of data production3 Mar 2016

Cite this

Kusch, G. (Creator), Edwards, P. (Creator), Martin, R. (Creator). (11 Jan 2017). Data resulting from the investigation of wide bandgap AlGaN:Si by wavelength dispersive X-Ray measurements. University of Strathclyde. AlGaN_wt_el(.xlsx), AlGaN_atomic_(.xlsx). 10.15129/fe2ea4ed-235c-4f7e-9301-4c9677bffddb