This dataset is the result of a systematic investigation of the Si concentration and composition of AlGaN:Si by wavelength dispersive X-ray measurements (WDX). The investigated samples cover a composition range of 80-100% AlN with a Si concentration between 3*10^18 to 14*10^18. The data was acquired using a Cameca SX 100 electron probe microanalyser. The dataset contains two Files, one for the weight% and one for the atomic%.
|Date made available||11 Jan 2017|
|Publisher||University of Strathclyde|
|Date of data production||3 Mar 2016|
Kusch, G. (Creator), Edwards, P. (Creator), Martin, R. (Creator). (11 Jan 2017). Data resulting from the investigation of wide bandgap AlGaN:Si by wavelength dispersive X-Ray measurements. University of Strathclyde. AlGaN_wt_el(.xlsx), AlGaN_atomic_(.xlsx). 10.15129/fe2ea4ed-235c-4f7e-9301-4c9677bffddb