Data for: "Study on the vertical ultrasonic vibration-assisted nanomachining process on single-crystal silicon"



The dataset contains numerical data to illustrate the relationship between machined depth of nanochannels and applied normal load and tip feed rate when machining using SS and UVS approaches. The data can be read by using origin software.
Date made available1 Oct 2021
PublisherUniversity of Strathclyde

Cite this