The data provided here in support for the paper: ''Strain-induced modifications of thin film silicon membranes by physical bending''.
The data attached is the following:
Contact length for different applied forces.opju: results from the FEA contact length as a function of different applied forces (data used for Figure 7b)
Directional deformation z comparison FEA with analytical analysis.opju: results from the FEA and analytical analysis directional deformation z as a function of distance from ridge (data used for Figure 8)
Directional deformation z for different applied forces.opju :results from the FEA directional deformation z as a function of different applied forces (data used for Figure 6b)
Max strains for different contact lengths.opju: results from the FEA maximum normal and shear strain as a function of different contact lenghts (data used for Figure 7a)
Normal strain comparison FEA with analytical analysis.opju: results from the FEA and analytical analysis normal strain e_xx as a function of distance from ridge (data used for Figure 10)
The EBSD data was acquired with an Oxford Instruments Nordlys EBSD system and the unprocessed EBSD patterns are saved as individual tiff files in the zip file.
All the above files can be opened through Origin software.
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For further information, please contact:
Eleni
[email protected]Jochen
[email protected]