Data for: "Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon"

Pengfei Fan (Creator)
Xichun Luo (Contributor)

Design, Manufacturing And Engineering Management

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2021
Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon
Wang, J., Yan, Y., Li, Z., Geng, Y., Luo, X. & Fan, P., 30 Nov 2021, In: Precision Engineering. 72, p. 480-490 11 p.
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