Data for: "Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon"

Pengfei Fan (Creator)
Xichun Luo (Contributor)

Design, Manufacturing And Engineering Management

Dataset

Description

The dataset contains numerical data to illustrate the relationship between the nanochannel depth and the applied normal load. The data can be read by using origin software.

Date made available	15 Jul 2021
Publisher	University of Strathclyde

Contact

researchdataproject@strath.ac.uk

DOI
10.15129/bd7aa4bd-6e68-43a8-804f-896ccad71692

Access Dataset

fig4_machined_depth_.opj
File: application/octet-stream, 435 KB
Type: Dataset
Licence: CC BY 4.0

1 Article

Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon
Wang, J., Yan, Y., Li, Z., Geng, Y., Luo, X. & Fan, P., 30 Nov 2021, In: Precision Engineering. 72, p. 480-490 11 p.
Research output: Contribution to journal › Article › peer-review

Open Access
File
10 Citations (Scopus)

2 Active

A hybrid precision manufacturing platform for next-generation of nanoscale products
Luo, X. & Watson, I.
EPSRC (Engineering and Physical Sciences Research Council)
1/07/21 → 30/06/24
Project: Research
A Multiscale Digital Twin-Driven Smart Manufacturing System for High Value-Added Products
Luo, X., Qin, Y. & Ward, M.
EPSRC (Engineering and Physical Sciences Research Council)
1/05/20 → 30/04/24
Project: Research

Zygo 3D Optical Profiler
Xichun Luo
Design, Manufacturing And Engineering Management
Facility/equipment: Equipment

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