The dataset contains numerical data to illustrate the relationship between the nanochannel depth and the applied normal load. The data can be read by using origin software.
Fan, P. (Creator), Luo, X. (Contributor) (15 Jul 2021). Data for: "Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon". University of Strathclyde. fig4_machined_depth_(.opj). 10.15129/bd7aa4bd-6e68-43a8-804f-896ccad71692