Data for: "On-chip frequency tuning of fast resonant MEMS scanner"

Ralf Bauer (Creator)
Paul JANIN (Contributor)
Deepak Uttamchandani (Supervisor)

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2022
On-chip frequency tuning of fast resonant MEMS scanner
Janin, P., Uttamchandani, D. & Bauer, R., Dec 2022, In: Journal of Microelectromechanical Systems. 31, 6, p. 977-983 7 p.
Research output: Contribution to journal › Article › peer-review

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