Data for: "On-chip frequency tuning of fast resonant MEMS scanner"

Description

This dataset contains the underlying data for the above mentioned manuscript.
The raw data, measured by a vibrometer and microscope, is present in the .zip files. Processed data is saved in .csv files, with a description of the processed files and the data extraction for plotting presented in the jupyter notebook file.

Date made available	13 Jun 2022
Publisher	University of Strathclyde

Contact

[email protected]

DOI
10.15129/c589d644-e614-4c0c-80b6-5af7fe786492

Access Dataset

220413_200umTuningMirror_Temperature_Chevron8V.csv
File: application/octet-stream, 1.9 KB
Type: Dataset
Licence: CC BY 4.0
220413_200umTuningMirror_Temperature_ChevronActuation.csv
File: application/octet-stream, 973 bytes
Type: Dataset
Licence: CC BY 4.0
220423_200umTuningMirror_AngleVsVoltage.csv
File: application/octet-stream, 1.5 KB
Type: Dataset
Licence: CC BY 4.0
220423_200umTuningMirror_Curvature.csv
File: application/octet-stream, 693 bytes
Type: Dataset
Licence: CC BY 4.0
220429_200umTuningMirror_frequencyVariation.csv
File: application/octet-stream, 631 bytes
Type: Dataset
Licence: CC BY 4.0
MEMSFrequTuningData.ipynb
File: application/octet-stream, 605 KB
Type: Interactive resource
Licence: CC BY 4.0
Readme.txt
File: text/plain, 789 bytes
Type: Text
Licence: CC BY 4.0
Vibrometer_measurement_FullFrequencySweep_without_tuning.zip
File: application/zip, 20.5 KB
Type: Dataset
Licence: CC BY 4.0
Vibrometer_measurement_Main_tilt_mode_tuning.zip
File: application/zip, 69 KB
Type: Dataset
Licence: CC BY 4.0
Vibrometer_measurement_Orthogonal_tip_mode_tuning.zip
File: application/zip, 192 KB
Type: Dataset
Licence: CC BY 4.0
220408_200umTuningMirror_FullFrequBoth2.csv
File: application/octet-stream, 152 KB
Type: Dataset
Licence: CC BY 4.0
220408_200umTuningMirror_FullFrequMain_ChevronAndSingleTrack.csv
File: application/octet-stream, 96.4 KB
Type: Dataset
Licence: CC BY 4.0
220408_200umTuningMirror_FullFrequOrtho_ChevronAndSingleTrack.csv
File: application/octet-stream, 88.2 KB
Type: Dataset
Licence: CC BY 4.0
220408_200umTuningMirror_TuningResponse2.csv
File: application/octet-stream, 9.99 KB
Type: Dataset
Licence: CC BY 4.0
220408_200umTuningMirror_TuningResponseMain2.csv
File: application/octet-stream, 2.2 KB
Type: Dataset
Licence: CC BY 4.0
220413_200umTuningMirror_InPlaneMovement.csv
File: application/octet-stream, 1.6 KB
Type: Dataset
Licence: CC BY 4.0
In_plane_displacement_measured_with_microscope.zip
File: application/zip, 11.3 MB
Type: Dataset
Licence: CC BY 4.0

1 Article

On-chip frequency tuning of fast resonant MEMS scanner
Janin, P., Uttamchandani, D. & Bauer, R., Dec 2022, In: Journal of Microelectromechanical Systems. 31, 6, p. 977-983 7 p.
Research output: Contribution to journal › Article › peer-review

Open Access
File
5 Link opens in a new tab Citations (Scopus)

71 Downloads (Pure)

2 Finished

MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination
Bauer, R. (Principal Investigator)
EPSRC (Engineering and Physical Sciences Research Council)
6/01/20 → 15/10/22
Project: Research
Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)
Bauer, R. (Principal Investigator)
Royal Academy of Engineering RAE
1/10/16 → 30/09/21
Project: Research Fellowship

Cite this

DataSetCite

Bauer, R. (Creator), JANIN, P. (Contributor), Uttamchandani, D. (Supervisor) (13 Jun 2022). Data for: "On-chip frequency tuning of fast resonant MEMS scanner". University of Strathclyde. 220413_200umTuningMirror_Temperature_Chevron8V(.csv), 220413_200umTuningMirror_Temperature_ChevronActuation(.csv), 220423_200umTuningMirror_AngleVsVoltage(.csv), 220423_200umTuningMirror_Curvature(.csv), 220429_200umTuningMirror_frequencyVariation(.csv), MEMSFrequTuningData(ipynb), Readme(.txt), Vibrometer_measurement_FullFrequencySweep_without_tuning(.zip), Vibrometer_measurement_Main_tilt_mode_tuning(.zip), Vibrometer_measurement_Orthogonal_tip_mode_tuning(.zip), 220408_200umTuningMirror_FullFrequBoth2(.csv), 220408_200umTuningMirror_FullFrequMain_ChevronAndSingleTrack(.csv), 220408_200umTuningMirror_FullFrequOrtho_ChevronAndSingleTrack(.csv), 220408_200umTuningMirror_TuningResponse2(.csv), 220408_200umTuningMirror_TuningResponseMain2(.csv), 220413_200umTuningMirror_InPlaneMovement(.csv), In_plane_displacement_measured_with_microscope(.zip). 10.15129/c589d644-e614-4c0c-80b6-5af7fe786492

Data for: "On-chip frequency tuning of fast resonant MEMS scanner"

Description

Contact

DOI

Access Dataset

Research output

On-chip frequency tuning of fast resonant MEMS scanner

Projects

MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Cite this