Data for: "On-chip frequency tuning of fast resonant MEMS scanner"



This dataset contains the underlying data for the above mentioned manuscript.
The raw data, measured by a vibrometer and microscope, is present in the .zip files. Processed data is saved in .csv files, with a description of the processed files and the data extraction for plotting presented in the jupyter notebook file.
Date made available13 Jun 2022
PublisherUniversity of Strathclyde

Cite this