Bauer, R. (Creator), JANIN, P. (Contributor), Uttamchandani, D. (Supervisor) (
13 Jun 2022). Data for: "On-chip frequency tuning of fast resonant MEMS scanner". University of Strathclyde. 220413_200umTuningMirror_Temperature_Chevron8V(.csv), 220413_200umTuningMirror_Temperature_ChevronActuation(.csv), 220423_200umTuningMirror_AngleVsVoltage(.csv), 220423_200umTuningMirror_Curvature(.csv), 220429_200umTuningMirror_frequencyVariation(.csv), MEMSFrequTuningData(ipynb), Readme(.txt), Vibrometer_measurement_FullFrequencySweep_without_tuning(.zip), Vibrometer_measurement_Main_tilt_mode_tuning(.zip), Vibrometer_measurement_Orthogonal_tip_mode_tuning(.zip), 220408_200umTuningMirror_FullFrequBoth2(.csv), 220408_200umTuningMirror_FullFrequMain_ChevronAndSingleTrack(.csv), 220408_200umTuningMirror_FullFrequOrtho_ChevronAndSingleTrack(.csv), 220408_200umTuningMirror_TuningResponse2(.csv), 220408_200umTuningMirror_TuningResponseMain2(.csv), 220413_200umTuningMirror_InPlaneMovement(.csv), In_plane_displacement_measured_with_microscope(.zip).
10.15129/c589d644-e614-4c0c-80b6-5af7fe786492