Data for: "High Figure‐of‐Merit Gallium Oxide UV Photodetector on Silicon by Molecular Beam Epitaxy: A Path toward Monolithic Integration"



This data is for room temperature cathodoluminescence (CL) of beta gallium oxide thin films grown on Si (111) substrate by MBE. Room Temperature (RT) CL is performed in a JEOL JXA-8530F field emission EPMA with an electron beam energy of 4 kV and a beam current of 40 nA. The CL spectra were acquired by a spectrometer with a focal length of 163 mm with 300 grooves mm−1 grating blazed at 500 nm, a 105 μm entrance slit (fiber size), and a 1024‐element charge‐coupled device.
Date made available23 Apr 2021
PublisherUniversity of Strathclyde
Date of data production2020 -

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