Data for: "Fundamental study of ductile regime diamond turning of single crystal gallium arsenide"

In this study, the crystallographic orientation dependence of mechanical properties of (001)-oriented GaAs was firstly studied through indentation tests via assuming the diagonals of indenter acting like the cutting edge of diamond tool with negative rake angle. Then, the anisotropic feature of machined surface after SPDT, influence of tool’s rake angle, critical depth of cut, and feasibility of generating smooth surface were thoroughly studied through experiments.
The two data sets show the depth of cuts and the measured anisotropic surface roughness at different angles for different tools. The Excel data files are self-explaining. The surface roughness is measured by ZYGO interferometer.