Research output per year
Research output per year
Description
This data was gathered and used to characterize a setup designed for maskless photo-lithography capable of additional structured light based functionality. The data set features.xlsx, .txt and .pptx files which includes characterization measurements of both the LED array and projected spot. Measurements of the photoresist and features created with it are also included. The power measurements were taken with an optical power meter and the film thickness and feature resolution was measured with a DekTak.
| Date made available | 22 Jan 2019 |
|---|---|
| Publisher | University of Strathclyde |
Research output
- 1 Paper
-
Digital illumination in microscale direct-writing photolithography: challenges and trade-off
Stonehouse, M., Zhang, Y., Guilhabert, B., Watson, I., Gu, E., Herrnsdorf, J. & Dawson, M., 12 Dec 2018. 4 p.Research output: Contribution to conference › Paper › peer-review
Open AccessFile
Projects
- 2 Finished
-
Light-controlled manufacturing of semiconductor structures: a platform for next generation processing of photonic devices
Martin, R., Dawson, M., Edwards, P., Skabara, P. & Watson, I.
EPSRC (Engineering and Physical Sciences Research Council)
1/07/17 → 31/07/22
Project: Research
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Doctoral Training Partnership (DTP 2016-2017 University of Strathclyde) | Stonehouse, Mark
Dawson, M., Gu, E. & Stonehouse, M.
EPSRC (Engineering and Physical Sciences Research Council)
1/10/16 → 9/12/21
Project: Research Studentship - Internally Allocated