Data for: "Automated Alignment in Mask-Free Photolithography Enabled by Micro-LED Arrays"

Alex Blanchard (Owner)
Mark Stonehouse (Creator)
Ian Watson (Contributor)
Johannes Herrnsdorf (Supervisor)
Martin Dawson (Supervisor)
Erdan Gu (Supervisor)
Benoit Jack Eloi Guilhabert (Contributor)
Yanchao Zhang (Creator)

Dataset

1 Article

1 results

2021
Automated alignment in mask-free photolithography enabled by micro-LED arrays
Stonehouse, M., Blanchard, A., Guilhabert, B., Zhang, Y., Gu, E., Watson, I. M., Herrnsdorf, J. & Dawson, M. D., 31 May 2021, (E-pub ahead of print) In: Electronics Letters. 57, 19, p. 721-723 3 p.
Research output: Contribution to journal › Article › peer-review

Open Access
File
3 Citations (Scopus)

73 Downloads (Pure)