Data for: "Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF MD Simulations"

Dataset

Description

This dataset includes the data from simulation results. Including evolution of bond/particle numbers, bond/particle countings, MSDs. The data can be read using notepad.
Date made available18 Mar 2024
PublisherUniversity of Strathclyde

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