This data is the result of cathodoluminescence hyperspectral imaging and wavelength-dispersive X-ray measurements carried out on a set of InAlGaN epilayers, grown at the Technische Universität Berlin using a range of different precursor fluxes. Details of the samples are given in Sample_details.txt, details of the measurements in Measurement_details.txt, and a description of the proprietary cathodoluminescence file format in File_formats.txt.
Further analysis and interpretation of this data is presented in the associated journal article, and figure numbers referred to in the data correspond to those used in this paper:
G. Kusch et al.,"Influence of InN and AlN concentration on the compositional inhomogeneity and formation of InN-rich regions in InxAlyGa1-x-yN", Jap. J. Appl. Phys. (2019).