DMEM Seminar Series: Ion Beam Nanofabrication (by Dr Zongwei Xu)

Zeng, Q. (Participant)

Activity: Participating in or organising an event typesParticipation in workshop, seminar, course


Dr. Zongwei Xu Centre of MicroNano Manufacturing Technology, Tianjin University, China Abstract: As one important nanofabrication technology, Ion Beam technology shows unique advantages of direct writing with nanoscale ability and functional micro/nano structure nanofabrication. This presentation will show the recent research results of ion beam nanofabrication and its applications in bio-sensing and Si/SiC brittle materials’ SEM in-situ nanocutting from Centre of MicroNano Manufacturing Technology, Tianjin University. Surface enhanced Raman spectroscopy (SERS) was one important method for trace detections and biochemical applications because of its ultra-sensitivity, and real-time analysis. FIB and beam induced deposition methods were used to fabricate good performance SERS substrate with nanogap less than 20 nm. One facile method to fabricate 3D nanofeature arrays for SERS substrates was explored by combining the self-assembly of nanoscale polystyrene spheres with ion sputter Au film coating. The evolution mechanism of 3D morphology with SERS sensitive was discussed. The developed SERS substrate showed good performance for the trace detection of melamine and sudan red III. Ion implantation assisted brittle material’s diamond turning was proved to be capable of effectively enhancing surface quality and prolonging the tool life for silicon machining from MNMT in 2011. SEM online nanocutting platform was developed under FIB/SEM dualbeam system from MNMT in 2015, which would have great potential to discover the mechanism of hard and brittle material’s machining. In the second part of this talk, some newest fundamental research results on Ga+ implantation assisted Si/SiC brittle material’s SEM online diamond tool nanocutting will be presented. Short Biography: Zongwei Xu received his Doctoral Degree in Mechanical Manufacture and Automation from Harbin Institute of Technology, China in 2007. In 2009, he became Associate Professor for College of Precision Instrument & Opto-electronics Engineering at Tianjin University, China. His main research interests include Focused Ion Beam (FIB) nanofabrication, Surface-Enhanced Raman Spectroscopy (SERS) substrate for Bio-sensing, Nanofabrication under SEM/FIB dualbeam system. As Principal Investigator (PI), eleven projects have been granted, including Four National Natural Science Foundation of China (NSFC) projects, one International Cooperation and Exchange project with Royal Society, UK. Dr. Zongwei Xu has published more than 50 papers, 5 book chapters, 14 patents. He is a Guest Editor for Current Nanoscience, a Section Editor for Nee A.(Ed.) Handbook of Manufacturing Engineering and Technology (Springer). He was invited as peer reviewer for 15 international Journals, and was the academic or organization committee member for 8 International conferences. He was selected as a representative by Chinese academy of engineering (CAE) in 2015, participated "4th China-America Frontiers of Engineering Symposium" organized by CAE and US National Academy of Engineering (NAE) and "1st Indo-Chinese Young Engineering Leaders' Conclave (ICON-1)" organized by CAE and Indian National Academy of Engineering (INAE). He was granted with "Young Researchers" Award in the 3rd Asian Precision Engineering and Nanotechnology International Conference (ASPEN), Japan, 2009, and delivered 8 Invited talks at international conferences.
Period12 Sep 2016
Event typeSeminar
LocationGlasgow, United Kingdom
Degree of RecognitionLocal